Air bearing rotary table with direct drive for high accuracy applications.
Typically this stage is combined with a XY stage (5102.05) and slip rings. The use in an Eulerian cradle 512 is also possible.
Equipped with a direct drive motor and a high accuracy rotary encoder for position controlled applications.
Rotor can be clamped by turning off air.
|Length x width x height [mm]:||115 x 115 x 49|
|Carrying capacity axial [N]:||200|
|Carrying capacity radial [N]:||60|
|Run out error axial [µm]:||0.1 (+/- 1µm with XY combination)|
|Run out error radial [µm]:||0.1 (+/- 1µm with XY combination)|
|Stiffness axial [N/µm]:||20|
|Stiffness radial [N/µm]:||7|
|Inclination max. load [Nm]:||10|
|Resistance against tilt [Nm/µrad]:||0.033|
|Inclination complience [µrad/Nm]:||30|
|Inertial moment [kg m²]:||0.001|
|Air supply pressure [bar]:||5|
|Air consumption [Nl/min]:||12|
|Material (housing):||Aluminum anodized|
|Material (rotor):||Aluminum hard coated|