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Products
1. Components
1.1. Translation
Linear Stage
XY-Stages
Z-Stages
Z-Adjustment
5104.A
5104.B
5104.C
5104.D
1.2. Rotation
1.3. Alignment bases
1.4. X-Pods
2. Systems
3. Control
4. Accessories
Vacuum-Products
Extreme conditions
Service
Company
Contact
News
Events
Home
Products
Vacuum-Products
Extreme conditions
Service
Company
Contact
News
Events
1. Components
2. Systems
3. Control
4. Accessories
1.1. Translation
1.2. Rotation
1.3. Alignment bases
1.4. X-Pods
Linear Stage
XY-Stages
Z-Stages
Z-Adjustment
5104.A
5104.B
5104.C
5104.D
Z-Adjustment
5104.A
5104.B
5104.C
5104.D
Integrated Z-Stages Series 5104
intermateable with Goniometers
F max [N]
r [mm]
5104.A
408, 409, 410, 411
50
20/40
5104.B
409, 410, 411
50/100/150
25
5104.C
420, 430, 440
500
40*
5104.D
480
2000
250*
r=travel range
* extended or shortened travel range optionally available
