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EZ0570 Air Bearing Stage

Air bearing rotary table with direct drive for high accuracy applications.

Equipped with a direct drive motor and a high accuracy rotary encoder for position controlled applications.

Rotor can be clamped by turning off air.

Mechanical specifications:

Length x width x height [mm]: 200 x 200 x 140
Turning range [°]: 360
Carrying capacity axial [N]: 2500
Carrying capacity radial [N]: 2500
Run out error axial [µm]: 0.1
Run out error radial [µm]: 0.1
Stiffness axial [N/µm]: 350
Stiffness radial [N/µm]: 125
Resistance against tilt [Nm/µrad]: 0.58
Inclination complience [µrad/Nm]: 1.7
Inclination max. load [Nm]: 70
Inertial moment [kg m²]: 0.019
Weight [kg]: 15.43
Air supply pressure [bar]: 5
Air consumption [Nl/min]: 18
Material (housing): Aluminum anodized grey
Material (rotor): Aluminum hard coated black

Measurement system:

Numerik Jena RIK4  
Signals per rotation: 9000 / 18000
Signal output: RS 422 / 1Vpp
Reference signal: TTL active high

Motor specifications:

Continiuous/peak torque [Nm]: 8 / 22
Continiuous /peak current [A eff]: 3 / 8

Control system:

Servo motor controllers are available on request.