13-Axes System: Z/XY/Rz/RxRy/Z/XY/Rx/ZY/Rz
Combination consisting of:
- Z-Stage 5103F40
- XY-Stage5102.50
- Goniometer 430
- 2-Circle Segment 5203.80
- Z-Stage 5103.D20
- XY-Stage 5102.25
- Circle Segment 5202.10
- YZ-Stage 5107.C20
- Goniometer 411
Accessories:
- Incremental encoder
- Absolute encoder
- Controller