Slit Screen 3100.20
- principle: vertical or horizontal asymmetric slit pairs
- blade material: 2mm tungsten (others on request)
- resolution: 0.884 μm at 400 steps/rev.
- range: +/- 3mm
- repeatability: < 0.5μm (typically < 0.2μm)
- backlash: < 3μm
- drive: Step motor controller
- limit switch, home switch
- dimension (in beam direction): 46mm
- encoders: optional
- atmosphere: He or vacuum (additional windows required)
- available slit modules:
- 3100.20 horizontal
- 3100.21 vertical