Air bearing rotary table with direct drive for high accuracy applications.
Typically this stage is combined with a XY stage (5102.05) and slip rings. The use in an Eulerian cradle 512 is also possible.
Equipped with a direct drive motor and a high accuracy rotary encoder for position controlled applications.
Rotor can be clamped by turning off air.
Mechanical specifications:
| Length x width x height [mm]: | 115 x 115 x 49 |
| Carrying capacity axial [N]: | 200 |
| Carrying capacity radial [N]: | 60 |
| Run out error axial [µm]: | 0.1 (+/- 1µm with XY combination) |
| Run out error radial [µm]: | 0.1 (+/- 1µm with XY combination) |
| Stiffness axial [N/µm]: | 20 |
| Stiffness radial [N/µm]: | 7 |
| Inclination max. load [Nm]: | 10 |
| Resistance against tilt [Nm/µrad]: | 0.033 |
| Inclination complience [µrad/Nm]: | 30 |
| Inertial moment [kg m²]: | 0.001 |
| Weight [kg]: | 2.5 |
| Air supply pressure [bar]: | 5 |
| Air consumption [Nl/min]: | 12 |
| Material (housing): | Aluminum anodized |
| Material (rotor): | Aluminum hard coated |
