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EZ0675 XY Air Bearing Stage

Air bearing rotary table with direct drive for high accuracy applications.

Typically this stage is combined with a XY stage (5102.05) and slip rings. The use in an Eulerian cradle 512 is also possible.

Equipped with a direct drive motor and a high accuracy rotary encoder for position controlled applications.

Rotor can be clamped by turning off air.

Mechanical specifications:

Length x width x height [mm]: 115 x 115 x 49
Carrying capacity axial [N]: 200
Carrying capacity radial [N]: 60
Run out error axial [µm]: 0.1 (+/- 1µm with XY combination)
Run out error radial [µm]: 0.1 (+/- 1µm with XY combination)
Stiffness axial [N/µm]: 20
Stiffness radial [N/µm]: 7
Inclination max. load [Nm]: 10
Resistance against tilt [Nm/µrad]: 0.033
Inclination complience [µrad/Nm]: 30
Inertial moment [kg m²]: 0.001
Weight [kg]: 2.5
Air supply pressure [bar]: 5
Air consumption [Nl/min]: 12
Material (housing): Aluminum anodized
Material (rotor): Aluminum hard coated

Motor specifications:

Revolutions per minute [rpm/min]: 1000
Continiuous/peak torque [Nm]: 0.5 / 5
Intermediate circuit voltage [V]: 60
With hall sensor  

Measurement system:

Signal periods per revolution: 10.000 / TTL up to 4.000.000
Signal output: 1Vss / alternative RS 422

Control system:

Servo motor controllers are available on request.

EZ0675 XY Luftlager